微机电系统基础（英文版）

Microelectromechanical Systems (MEMS) technology has taken over a critical role in the development of modern electronic and mechanical products. In this textbook- Microelectromechanical Systems: Fundamental and Applications, authors Jürgen Brugger and Pascal Ruther cover all the fundamental knowledge required for students to understand the MEMS technology.One of the key strengths of the book is its balanced effort to cater to the needs of students from different backgrounds, including those specializing in mechanical engineering, electronic engineering or interdisciplinary studies. The book starts with a brief history of MEMS technology and the intrinsic characteristics that make them so important in modern product design. The book then dives deep into MEMS devices – their types, working principles, and various fabrication processes.The book includes an overview of microfabrication processes, including silicon-based MEMS processes and new materials and fabrication processes. The authors do not shy away from the technicalities of MEMS devices and provide a detailed review of essential electrical and mechanical concepts required to understand how these devices work.The book also includes examples of four typical sensors: Inertia Sensor, Pressure Sensor, Flow Sensor, and Tactile Sensor. It's a great way to compare different types of sensors, their working principles, and manufacturing processes. It also helps students to develop their innovation and creative skills.Overall, the book is an excellent guide for anyone interested in learning about MEMS technology in a comprehensive and well-structured way. The authors have a broad understanding of the subject, and they have set out the content in an accessible and easy-to-understand format.With its balanced focus on design, manufacturing, and materials, and its introduction to cutting-edge research in the field, this textbook is a must-read for any mechanical or electronic engineering student interested in MEMS technology.