薄膜材料与技术导论（英文）

Thin film materials are widely used in modern technology, making understanding their science crucial for developing high-tech industries. This book covers the basics of vacuum and plasma technology, as well as methods for preparing thin films through physical vapor deposition and chemical vapor deposition. It also covers the measurement of film thickness and growth, and the recent advances in thin film materials and technology. The book's comprehensive coverage and clear writing make it a valuable resource for anyone working in high-tech industries, particularly microelectronics, communications, and aerospace. It provides the fundamentals of the science behind thin film technology and allows readers to gain a deeper understanding of its applications. The author's expertise and experience in the field make this book a trusted and reliable source of information. Overall, Introduction to Thin Film Materials and Technology is a must-have reference for anyone interested in this rapidly evolving field.